Initial growth state MoS2 thin film by magnetron sputtering

Growth of wafer-scale MoS2 monolayer by magnetron sputtering.

The two-dimensional layer of molybdenum disulfide (MoS2) exhibits promising prospects in the applications of optoelectronics and valleytronics. Herein, we report a successful new process for synthesizing wafer-scale MoS2 atomic layers on diverse substrates via magnetron sputtering. Spectroscopic and microscopic results reveal that these synthesized MoS2 layers are highly homogeneous and crystal...

Thin-film TiPbO3 varistors obtained by two-source magnetron sputtering

Off-normal Film Growth by High Power Impulse Magnetron Sputtering

In this study we contribute towards establishing the process-microstructure relationships in thin films grown off-normally by ionized physical vapor deposition. High power impulse magnetron sputtering (HiPIMS) is used at various peak target powers and deposition rates to grow copper (Cu) and chromium (Cr) films from a cathode placed at an angle 90 degrees with respect to the substrate normal. F...

The tribological properties of Cu-Ni3Al-MoS2 composite coating deposited by magnetron sputtering

In industrial applications, most materials are exposed to wear and friction because multiple conditions are used. However, the tribological properties of these materials can be improved with different techniques. One such technique that improves the frictional property of a surface is the use of self-lubricating coatings. In this study, multicomponent coatings of nominal composition Cu-Ni3Al-Mo...

Plasma Characterization and Thin Film Growth and Analysis in Highly Ionized Magnetron Sputtering

The present thesis addresses two research areas related to film growth in a highly ionized magnetron sputtering system: plasma characterization, and thin film growth and analysis. The deposition technique used is called high power pulsed magnetron sputtering (HPPMS). Characteristic for this technique are high energy pulses (a few Joules) of length 50-100 μs that are applied to the target (catho...